Multiphysics Simulation Used in Design of MOEMS-based Torsion Micromirror Optical Switch

Plander, I., Štepanovský, M.

PLANDER, I. and M. ŠTEPANOVSKÝ. Multiphysics Simulation Used in Design of MOEMS-based Torsion Micromirror Optical Switch. Acta Mechanica Slovaca. 2009, 13(1), 70-77. ISSN 1335-2393.