Multiphysics Simulation Used in Design of MOEMS-based Torsion Micromirror Optical Switch
Plander, I.,
Štepanovský, M.
PLANDER, I. and M. ŠTEPANOVSKÝ. Multiphysics Simulation Used in Design of MOEMS-based Torsion Micromirror Optical Switch. Acta Mechanica Slovaca. 2009, 13(1), 70-77. ISSN 1335-2393.