The Multiphysics Model of the Gas-damped Micromirror for the MEMS-based optical Switch

Plander, I., Štepanovský, M.

PLANDER, I. and M. ŠTEPANOVSKÝ. The Multiphysics Model of the Gas-damped Micromirror for the MEMS-based optical Switch. In: TROCH, I. and F. BREITENECKER, eds. Proceedings of the 6th Vienna Conference on Mathematical Modelling. Mathematical modelling, Vídeň, 2009-02-12/2009-02-13. Vienna: ARGESIM, 2009. p. 2700-2703. ISBN 978-3-901608-35-3.