The Simulation of the Squeeze Film Damping Effect in MEMS-based Optical Switch

Plander, I., Štepanovský, M.

PLANDER, I. and M. ŠTEPANOVSKÝ. The Simulation of the Squeeze Film Damping Effect in MEMS-based Optical Switch. In: Proceeding of the International Workshop MOSMIC 2007. Modelling and Simulation in Management, Informatics and Control, Žilina, 2007-10-15/2007-10-16. Žilina: Žilinská univerzita, 2007. p. 15-20. ISBN 978-80-8070-807-8.