Decoupling of two-axis electrostatically-actuated 3D MEMS mirror

Štepanovský, M., Plander, I.

PLANDER, I. and M. ŠTEPANOVSKÝ. Decoupling of two-axis electrostatically-actuated 3D MEMS mirror. In: Informatics 2015. 2015 IEEE 13th International Scientific Conference on Informatics, Poprad, 2015-11-18/2015-11-20. Piscataway: IEEE, 2015. p. 211-216. ISBN 978-1-4673-9868-8. DOI 10.1109/Informatics.2015.7377834.

URL: http://ieeexplore.ieee.org/document/7377834/