Interdisciplinary considerations on the design of MEMS actuators from a perspective of their optimality

Plander, I., Štepanovský, M.

PLANDER, I. and M. ŠTEPANOVSKÝ. Interdisciplinary considerations on the design of MEMS actuators from a perspective of their optimality. Sensors and Actuators. 2018, 269 203-211. ISSN 0924-4247.